Investigation of Bath Degradation during Copper Electrochemical Deposition
碩士 === 國立交通大學 === 材料科學與工程系 === 91 === The degradation effects on (PEG, SPS)-containing baths are investigated in this study. The baths are analyzed by three methods: in-situ measured v-t curves of galvanostatic plating, AC-impedance scan, and i-E curve scan. The gap-filling capability for...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53036196701944719421 |