Acoustic Characteristics of Miniature PVDF Pressure Sensors

• Main Authors: Thung-Jie Hwa, 花聰傑
• Other Authors: Yi-Chun Wang
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/69724472490766568381

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 91 === This study employed a excimer laser mirco-maching technique on a thick PVDF (polyvinylidene fluoride) piezoelectric film to fabricate miniature pressure sensors .The sizes of sensing area are 1.5mm×1.5mm and 2mm×2mm. To investigate the acoustic characteristics of the sensors , acoustic fields generated by ultrasound transducers and hydrophones were used to test the sensors in frequencies of the orders of few MHz and tens of kHz respectively. Sensitivities of the sensors were obtained by comparing the sensor output to those of calibrated hydrophones which were located nearby in the same acoustic field.