Investigation of Excimer Laser Ablation of Copper Thin Film using Molecular Dynamics
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 91 === This study is focused on the investigation of the physical mechanisms about the excimer laser ablation of copper thin film using molecular dynamics. After laser material interacting, the physical mechanisms of ablating thin film and arrangement of cooling atom...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33233355395356414630 |