| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 91 === The purpose of this paper is to discuss how to improve the position accuracy effect by the friction force. The improving methods can be designing a low-friction hardware and compensation in controller. The hydraulic slider designed in this paper is with the PTFE slipper-seal and linear guide so it can achieve the low-friction goal. After measuring the friction force of the slider in each kind of working condition and multi-point positioning, the control performance of the slider designed in this paper is better than the general hydraulic slider, but when the slider reaches the goal position, it slips easily because of the null point draft. According to the friction character of the system, we can try to design the compensation signal for the stick friction due to the low working velocity. In the result of the control experiment, the controller with either the max static friction compensation or the dither signal can let the general slider achieve 1μm position accuracy.
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