Performance Evaluation of Precision machine tools by using Laser diodes and PSDs

• Main Authors: Chun-Jen Chen, 陳俊仁
• Other Authors: Psang-Dain Lin
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/30195314174731918320

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 91 === In this thesis, two measuring systems were developed: (1) a spindle error measuring system to measure the errors motion of spindle, and (2) a PSD plat measuring system to measure the geometric error of CMM/machine tools. The advantages of the spindle error measurment system are its low cost and its multi-functions, which include spindle speed measurement, spindle acceleration measurement and spindle thermal drift measurement. Further more, with the benefit of a built-in power system, there was no wiring problem. Thus, no limitations exist on continue test of spindle error. Both software and hardware were established in this measurement system. Its uncertainty can be up to 0.5μm. The PSDs plat measuring system consists of 2 lasers and 4 PSDs. By specifying its measuring path, the geometric errors of a three-axis machine tool can be obtained. It can use in CMM and CNC machine tool repeatability test. Both software and hardware were also developed. Its uncertainty can be up to 1μm. keyword：spindle error, position sensing detector, inverse method, geometric error.