The study of low temperature metal (Au) induced lateral crystallization (MILC) poly-Si1-xGex thin film for optoelectronic applications

The study of low temperature metal (Au) induced lateral crystallization (MILC) poly-Si1-xGex thin film for optoelectronic applications

碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 91 === The gold (Au) metal induced lateral crystallization (MILC) of hydrogenated amorphous silicon germanium (a-Si1-xGex:H) thin films have been investigated with various annealing temperature (400∼500℃) and annealing time (3∼10hr). After 500℃, 3∼10hr annealing tr...

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Bibliographic Details
Main Authors:	Wen-De Wang, 王文德
Other Authors:	Yean-Kuen Fang
Format:	Others
Language:	zh-TW
Published:	2003
Online Access:	http://ndltd.ncl.edu.tw/handle/85245749983477994559

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