The study of low temperature metal (Au) induced lateral crystallization (MILC) poly-Si1-xGex thin film for optoelectronic applications
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 91 === The gold (Au) metal induced lateral crystallization (MILC) of hydrogenated amorphous silicon germanium (a-Si1-xGex:H) thin films have been investigated with various annealing temperature (400∼500℃) and annealing time (3∼10hr). After 500℃, 3∼10hr annealing tr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85245749983477994559 |