Stiction Relief of Polysilicon Thin Film
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 91 === Surface micromachining is a process to fabricate free standing and freely moving microstructures in a large two dimensional design space. The tick is to deposit and pattern two thin films of materials that can be etched away selectively with respect to each...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34020669427764993466 |