Control of System with Asymmetric Hysteresis and its Application to Piezo Driven Stage Positioning Control

• Main Authors: Chieh-Jen Lee, 李傑仁
• Other Authors: Chieh-Li Chen
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/72341543306738182137

碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 91 === The main purpose of this study is to perform the high precision positioning control task of a hysteresis system by means of an accurate hysteresis modeling. In the hysteresis modeling, a concept of switched system is adopted to describe the Preisach type hysteresis. The systematic modeling procedure is established to obtain the hysteresis system’s parameters step by step. Besides, the geometry of RIP is composed to explain the relationships between the input and the output of a hysteresis system. This is a good compensated procedure for hysteresis modeling. In this study, a piezo driven stage is used to verify the modeling accuracy. Comparing the simulation and the experimental results, it shows the proposed model in this study has a great ability of describing the asymmetric hysteresis phenomena. A control structure includes a feedforward controller and a PD type feedback controller used to realize the high precision positioning control.