| Summary: | 碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 91 === There are constantly new technologies and information generated in the field of semiconductors and integrated circuit (IC). In order to extract knowledge effectively, we need a knowledge-based system with a clear structure. In this thesis research, an IC thin film knowledge-based system has been constructed from the standpoint of knowledge management and demonstrated in the form of web-sites.
A clear structure is employed in this knowledge-based system. In the first level, all films were classified into two categories based on their electrical properties: insulator and conductor. In the second level, insulating films were classified into six classes based on their functions: field oxide, gate oxide, dielectric layer, passivation, sidewall spacer, and diffusion barrier. Conducting films were further classified into eight classes based on their functions: gate electrode, S/D contact, interconnect, diffusion barrier, via, glue/adhesion layer, anti-reflection layer, and diffusion layer. Each class at the second level was further divided in accordance with the positions, materials, processes, etc. Arranging all the information, the IC thin film knowledge-based system was constructed and demonstrated in the form of web-sites.
The IC thin film knowledge-based system has the value of knowledge management. It can not only help the beginners but also more experienced engineers in the field of semiconductors and integrated circuit. Compare with other ways of knowledge acquisition, this knowledge-based system is easier to be modified and updated. It also has a hierarchic structure and a Site-search function to enhance its value. This knowledge-based system offers a good tool of obtaining knowledge in various levels of engineering expertice.
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