The Application of Fe-Ni-Cr/InvarBimetal Membrane on Microactuators
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 91 === In this study the materials properties and membrane performance of the 75Fe-22Ni-3Cr(FNC)/64Fe-36Ni(Invar) bimetal freestanding mem- brane was investigated. The FNC and Invar films were prepared by DC magnetron sputtering. The test structure for mechan...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50041516618898346268 |