多晶矽微電熱式致動器之運動特性探討及其應用於可調變光衰減器之研究

• Main Authors: Yu-Shen Lin, 林佑昇
• Other Authors: Chengkuo Lee
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/31492644056857817488

碩士 === 國立中興大學 === 精密工程研究所 === 91 === Microactuators of different actuation mechanisms, such as electrostatic, electromagnetic, piezoelectric and electrothermal, and so on, have been demonstrated by means of micromachining technology. Among them, surface micromachined electrothermal actuator (ETA) is very attractive for many applications, such as optical MEMS and RF MEMS, due to its advantages of relatively large output force and displacement. In the practical applications, the long-term motion stability of actuator is very crucial. Based on the experimental observation, however, we found that U-shape ETA often showed unstable motion. This motion instability was very possibly caused by floating-charge-induced electrostatic force. We investigate the motion behavior of U-shape ETA actuator, and discuss relations between the observed results and influence of accumulated floating charge to the motion stability. Afterwards we develop optimized ETA and conclude it with optimum motion characteristics and force output. Additionally, we design a new movement translation micromechanism (MTM), that is proposed to amplify small in-plane displacement into large out-of-plane rotation angle and vertical displacement. A novel optical light attenuation method is capable of steering a portion of transmitted light toward out-of-plane direction in terms of rotation angle change of pop-up mirror manipulated by using our optimized ETA array and proposed MTM.