Measurement of Micromechanical Properties of Poly-Silicon and Silicon-Nitride Composite Thin-Film

• Main Authors: Alex Lin, 林鴻輝
• Other Authors: 游憲一
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/77897075549319415396

碩士 === 國立中興大學 === 機械工程學系 === 91 === The composite thin-film structure, instead of the single layer thin film, is studied in this paper. Measurements of the mechanical properties of the composite thin-film are presented. The composite thin-film made of Poly-silicon and Silicon-nitride is used. The mechanical properties of thin-film are assessed by the linear relationship of a load-deflection diagram obtained from the experiments of a cantilever beam subjected to a concentrated load. The composite thin-film cantilevers are made using the technique of photolithography. Several different sizes in width dimension are made in order to analyze the plate effect of the composite beams and the poisson’s ratio of thin film is therefore obtained. The results obtained in the present paper are in good accordance with that found by other researchers, i.e., the Young’s modulus and Poisson ratio are 165±5Gpa, 0.26 and 258±10Gpa, 0.25 for the homogeneous materials of poly-silicon and silicon-nitride, respectively. The Young’s modulus and Poisson ratio is also obtained as 228Gpa and 0.26 for the three-layer composite thin film, a value somehow between those obtained above for the homogeneous materials.