| Summary: | 碩士 === 華梵大學 === 機電工程研究所 === 91 === The purpose of this thesis is to design, analyze and fabricate a micro switched reluctance motor integrated with eddy current sensors. The semiconductor techniques and micro electroforming are utilized to combine the micro motor stator and eddy current sensors into the same fabrication processes so the motor can be made with low cost and high precision. The 4-phase motor is an axial air gap design with a 6-polar rotor and 8-polar stator. The motor has an outer diameter of 5mm, thickness of 1.5mm, air gap of 0.1mm, and step angle of 15°.
The micro motor is designed with “pile” assembly concept for simplicity. A two-layer SU-8 supporting structure is used to maintain a constant axial air gap. The magnetic circuit design is analyzed and optimized using ANSYS software. The motor stator and rotor are made by the LIGA-like processes and sacrificial layer etching. The motor base and magnetic connectors are made by precision machining. By applying the above techniques the motor achieves simple mechanical design, low fabrication cost, and good system stability.
One of the major contributions of this research is to combine the micro motor stator and eddy current sensors into one piece. The sensor coils are fabricated on the top of the stator so there is no need for assembly. Each sensor coil has a total of 9 turns with a line width of 7µm, line space of 7µm, thickness of 7µm, and footprint of approximately 500µm×500 µm. The eddy current sensors can be used to measuring the position, velocity, and direction of the motor.
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