The study of multilayer transparent conducting films
碩士 === 輔仁大學 === 物理學系 === 91 === ITO/Ag/ITO,TiO2/Ag/ITO multilayer and ITO single layers were prepared by RF-magnetron sputtering with different oxygen concentrations of the sputtering atmosphere during the ITO deposition. The multilayer showed a high optical transmittance and good electri...
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2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47795891022673918975 |
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ndltd-TW-091FJU001980202015-10-13T17:01:20Z http://ndltd.ncl.edu.tw/handle/47795891022673918975 The study of multilayer transparent conducting films 干涉式多層透明導電膜之研究 陳安琪 碩士 輔仁大學 物理學系 91 ITO/Ag/ITO,TiO2/Ag/ITO multilayer and ITO single layers were prepared by RF-magnetron sputtering with different oxygen concentrations of the sputtering atmosphere during the ITO deposition. The multilayer showed a high optical transmittance and good electrical conductivity. With a 19nm intermediate silver layer an ITO/Ag/ITO sheet resistance of 4Ω/□ and a high optical transmittance of 95% at 502nm was achieved. With a 19nm intermediate silver layer an TiO2/Ag/ITO sheet resistance of 5.8Ω/□ and a high optical transmittance of 93% at 568nm was achieved. It could satisfy the requirement for the flat panel display. 凌國基 2003 學位論文 ; thesis 0 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
| description |
碩士 === 輔仁大學 === 物理學系 === 91 === ITO/Ag/ITO,TiO2/Ag/ITO multilayer and ITO single layers were prepared by RF-magnetron sputtering with different oxygen concentrations of the sputtering atmosphere during the ITO deposition. The multilayer showed a high optical transmittance and good electrical conductivity. With a 19nm intermediate silver layer an ITO/Ag/ITO sheet resistance of 4Ω/□ and a high optical transmittance of 95% at 502nm was achieved. With a 19nm intermediate silver layer an TiO2/Ag/ITO sheet resistance of 5.8Ω/□ and a high optical transmittance of 93% at 568nm was achieved. It could satisfy the requirement for the flat panel display.
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| author2 |
凌國基 |
| author_facet |
凌國基 陳安琪 |
| author |
陳安琪 |
| spellingShingle |
陳安琪 The study of multilayer transparent conducting films |
| author_sort |
陳安琪 |
| title |
The study of multilayer transparent conducting films |
| title_short |
The study of multilayer transparent conducting films |
| title_full |
The study of multilayer transparent conducting films |
| title_fullStr |
The study of multilayer transparent conducting films |
| title_full_unstemmed |
The study of multilayer transparent conducting films |
| title_sort |
study of multilayer transparent conducting films |
| publishDate |
2003 |
| url |
http://ndltd.ncl.edu.tw/handle/47795891022673918975 |
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AT chénānqí thestudyofmultilayertransparentconductingfilms AT chénānqí gànshèshìduōcéngtòumíngdǎodiànmózhīyánjiū AT chénānqí studyofmultilayertransparentconductingfilms |
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