The study of multilayer transparent conducting films
碩士 === 輔仁大學 === 物理學系 === 91 === ITO/Ag/ITO,TiO2/Ag/ITO multilayer and ITO single layers were prepared by RF-magnetron sputtering with different oxygen concentrations of the sputtering atmosphere during the ITO deposition. The multilayer showed a high optical transmittance and good electri...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47795891022673918975 |
| Summary: | 碩士 === 輔仁大學 === 物理學系 === 91 === ITO/Ag/ITO,TiO2/Ag/ITO multilayer and ITO single layers were prepared by RF-magnetron sputtering with different oxygen concentrations of the sputtering atmosphere during the ITO deposition. The multilayer showed a high optical transmittance and good electrical conductivity. With a 19nm intermediate silver layer an ITO/Ag/ITO sheet resistance of 4Ω/□ and a high optical transmittance of 95% at 502nm was achieved. With a 19nm intermediate silver layer an TiO2/Ag/ITO sheet resistance of 5.8Ω/□ and a high optical transmittance of 93% at 568nm was achieved. It could satisfy the requirement for the flat panel display.
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