A Study on the Plasma Diagnostic of PbZr0.54Ti0.46O3 Sputter Deposition
碩士 === 逢甲大學 === 材料科學所 === 91 === The properties and processing parameters of sputtering PZT ferroelectric thin film are closely linked. Therefore, two dual-target sets Pb/PZT and PbO/PZT were used to co-sputtering deposit PZT thin films on Si/SiO2/Ti/Pt substrates respectively to reveal how Pb comp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zm95ae |