A Design of Fizeau Type Micro-Interferometer and Its Application in 3D Profilometry
碩士 === 中原大學 === 機械工程研究所 === 91 === A Fizeau type interferometric microscope system has been developed for small scale surface profile measurement. Experiments were implemented with a fiber connector and a LED wafer. By using the PZT phase shifter and digital image system, the 3D profile data can be...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/kwt274 |