A Design of Fizeau Type Micro-Interferometer and Its Application in 3D Profilometry

• Main Authors: Wen-Shiao Huang, 黃文孝
• Other Authors: Ming Chang
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/kwt274

碩士 === 中原大學 === 機械工程研究所 === 91 === A Fizeau type interferometric microscope system has been developed for small scale surface profile measurement. Experiments were implemented with a fiber connector and a LED wafer. By using the PZT phase shifter and digital image system, the 3D profile data can be quantitatively obtained. The measuring range is 0.76mm*0.57mm, the horizontal resolution is 1.1μm, and the height measurement resolution is 2.5nm. For a single-mode fiber with 9μm diameter core and 2mm diameter ferrule, the average measured fiber height is 162.5nm with a standard deviation of 6.88nm and the average radius of curvature is 170mm with a standard deviation of 8.13mm. In the measurement of the wafer surface, there are silver pastes over the surface, and the reflect light from the silver pastes are too weak to let the fringe be read in effect, so the result is not good. In conclusion, the developed system can be used in measuring the surface profile of micro component products , but the noise of the light reflected from the surface do effect the measurement.