The Study of SAW Integrated Array Sensors

• Main Authors: Sheng-Min Huang, 黃聖閔
• Other Authors: Erik Jeng
• Format: Others
• Language: en_US
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/8e9f4b

碩士 === 中原大學 === 電子工程研究所 === 91 === Abstract Surface acoustic wave (SAW) devices have been used as filters in modern communication systems. In addition, Quartz SAW device using surface acoustic wave modes have been the most extensively used in mass sensing devices. SAW devices coated with polymer as chemical sensors become popular in the detection of a variety of organic gases. This thesis presents a Pierce-type oscillator using two-port SAW devices. The center frequency and the insertion loss of SAW device are 157MHz and –19.408dB respectively. The output frequency and power of oscillator using SAW device is 157.040MHz and 17.56dBm respectively, while its phase noise is -77.79dBc/Hz@100KHz. And the resulting power of SAW integration sensor after frequency differentiation is 2.38dBm@531KHz. SAW ocillators with organic films using polyimide and cellulose acetate detect the variation of the relative humidity. In addition, SAW ocillators coated with the poly(ethylenimine), ethyl cellulose, polystyrene and OV210 films detect variations of frequency for sensing vapors of water, ethanol, benzene, m-cresol and dichloroethane. Results were obtained and discussed with SAW devices for the organic gas detection.