Study and fabricate on SnO2 pH array sensor

• Main Authors: Zheng-Cheng Chen, 陳政成
• Other Authors: Shen-Kan Hsiung
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/3ydrt3

碩士 === 中原大學 === 電子工程研究所 === 91 === The ion selective electrode composes of three parts：sensors, reference electrodes and readout circuit. In this thesis, the ceramic reference electrode was made and compared with the commercial reference electrode. And a manufacturing processing of high performance SnO2 extended gate ion sensitivity field effect transistor (EGFET) was found and investigated. This manufacturing processing was compound with the photoresist lift-off processing to make a “SnO2 pH array sensor”. The characteristics of the SnO2 pH array sensor were studied. Matching a suitable read-out circuit it was the array sensor.