Study and fabricate on SnO2 pH array sensor
碩士 === 中原大學 === 電子工程研究所 === 91 === The ion selective electrode composes of three parts：sensors, reference electrodes and readout circuit. In this thesis, the ceramic reference electrode was made and compared with the commercial reference electrode. And a manufacturing processing of high performance...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3ydrt3 |
| Summary: | 碩士 === 中原大學 === 電子工程研究所 === 91 === The ion selective electrode composes of three parts：sensors, reference electrodes and readout circuit. In this thesis, the ceramic reference electrode was made and compared with the commercial reference electrode. And a manufacturing processing of high performance SnO2 extended gate ion sensitivity field effect transistor (EGFET) was found and investigated. This manufacturing processing was compound with the photoresist lift-off processing to make a “SnO2 pH array sensor”. The characteristics of the SnO2 pH array sensor were studied. Matching a suitable read-out circuit it was the array sensor.
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