| Summary: | 碩士 === 中華大學 === 電機工程學系碩士班 === 91 === Due to the reliability and stability concerns for more accurate bio-signal processing, sensor array related research becomes a major topic in recent years. This paper presents a 3V eight-channel ISFETs signal processing chip design. Compared to other published methods, the die size has been significantly minimized by using a shared readout circuit for multi-channel usage. In order to process the succeeding measured data, an auto-zero dual-slope A/D converter is also developed in this research. Furthermore, a component-based prototype was implemented for board-level evaluation. The system proves to work properly between pH2 to pH12 solutions at room temperature. The average sensitivity of Si3N4 sensing film is 53.8mV/pH.
The proposed signal processing circuit has been fabricated in TSMC 0.35um 1P4M CMOS technology, chip size is 1500*1500 um2 and the total power consumption is 1.54mW.
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