The Study of Coplanar Waveguide Bandpass Filter Using MEMS Technology
碩士 === 國立中正大學 === 機電光工程研究所 === 92 === Nowadays, the flourishing of worldwide communication market causes the demand and usage amount of microwave elements increasing daily. However, the component dimension is a critical study perspective as well. For the communication system components, the filter i...
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25263206925517431730 |
| Summary: | 碩士 === 國立中正大學 === 機電光工程研究所 === 92 === Nowadays, the flourishing of worldwide communication market causes the demand and usage amount of microwave elements increasing daily. However, the component dimension is a critical study perspective as well. For the communication system components, the filter is a key and particularly essential.
Therefore, the study utilized the Coplanar Waveguide (CPW) as the fundamental design theory, and integrated with Microshield line structure to build up a bandpass filter of f0=32GHz. This study implemented the MEMS technique and simulated the incidence of experiment inaccuracy to the design specification. The study also gathered and founded the related process parameters at the same time.
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