Advanced Oxidation Treatment of High-Strength Semiconductor Wastewater and IPA Recovery from Waste Organic Solution
碩士 === 元智大學 === 化學工程學系 === 90 === In a typical semiconductor manufacturing process, a large amount of isopropyl alcohol (IPA) is used for wafer cleaning. The wafer cleaning process invariably generates a large quantity of wastewater that contains complex and refractory organic compounds. In general,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99956912124098013330 |