Spin coating and manufacture of CD-R protective thin film layer
碩士 === 元智大學 === 化學工程學系 === 90 === Spin coating is a batch process in which a liquid film is spread by centrifugal force to form a thin film on a rotating disk. This technique is widely used in the electronics industry for integrated circuits, for optical storage disks, for liquid crystal display, or...
Main Authors: | Cho Chin-Sung, 卓錦松 |
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Other Authors: | T. Leon Yu |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/68607979702124188745 |
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