Fire Prevention Study of Wet Bench Cleaning Stages Among Semiconductor Manufacturing Processes-Incompatibilities of Hydrogen Peroxide
碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 90 === According to the research reports from the FM (Factory Mutual) Insurance Company in these two decades, most of the incidents occurred in semiconductor plants were identified as “Fire Cases”. These reports claimed the fires in Wet Chemical Cleaning Processes...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04376361811851860010 |