A Study of Barium Strontium Titanate High Dielectric Thin Films Deposited by RF-Sputter
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 90 === In this thesis, barium strontium titanate thin films were deposited at different growth temperatures by radio-frequency (RF) magnetron sputtering. Then the dielectric films were processed by O2 plasma surface treatment, furnace annealing, and pre-O2 plasm...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17647841757767394853 |