An Interferometer for measuring 3-D displacement of Micro-electro-mechanical System

• Main Authors: Hsin-Le Chen, 陳信樂
• Other Authors: Shyh-Tsong Lin
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/29196328777707042764

碩士 === 國立臺北科技大學 === 光電技術研究所 === 90 === This thesis is aimed to develop a laser interferometer for simultaneous、non-contact measurements of U, V, and W of microelectromechanical system (MEMS). In this interferometer, a laser beam is incident and focused at a crossed-lined grating bonded on the 3-D moving part of flexure that is drived dy PZT, The beam is then diffracted into several beams, (0,0), (1,0), (-1,0), (0,1), and (0,-1) orders, which are adopted for the displacements measurement. The (0,0) order is directed to interfere with a reference beam to generate an interference pattern that depends on the W-displacement. The (1,0) and (-1,0) orders are guided to produce an interference pattern that depends on the U-displacement, and the (0,1) and (0,-1) orders are adopted to form a pattern that depends on the V-displacement only. A crossed-lined-grating bounded on the 3-D moving part of flexure drived by PZT is applied in the experiment as the required MEMS possessed crossed-lined-grating . So we can know moving displacement . Using the proposed interferometer some experimental tests as conducted to verify the validity of the proposed interferometer.