| Summary: | 碩士 === 國立臺北科技大學 === 光電技術研究所 === 90 === This thesis is aimed to develop a laser interferometer for simultaneous、non-contact measurements of U, V, and W of microelectromechanical system (MEMS). In this interferometer, a laser beam is incident and focused at a crossed-lined grating bonded on the 3-D moving part of flexure that is drived dy PZT, The beam is then diffracted into several beams, (0,0), (1,0), (-1,0), (0,1), and (0,-1) orders, which are adopted for the displacements measurement. The (0,0) order is directed to interfere with a reference beam to generate an interference pattern that depends on the W-displacement. The (1,0) and (-1,0) orders are guided to produce an interference pattern that depends on the U-displacement, and the (0,1) and (0,-1) orders are adopted to form a pattern that depends on the V-displacement only.
A crossed-lined-grating bounded on the 3-D moving part of flexure drived by PZT is applied in the experiment as the required MEMS possessed crossed-lined-grating . So we can know moving displacement .
Using the proposed interferometer some experimental tests as conducted to verify the validity of the proposed interferometer.
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