A Study on the Microstructure of the Ni-Al-Fe Based Intermetallics Thin Films

碩士 === 中國文化大學 === 材料科學與製造研究所 === 90 === This experiment produces Ni Al Fe based Intermetallics by arc-melting. The melted Ni Al Fe based Intermetallics is then polished into target. Subsequently, upon the method of Physical vapor deposition, the Ni Al Fe based Intermetallics thin films is sputtere...

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Bibliographic Details
Main Authors: Kai-Yu Chen, 陳開羽
Other Authors: Chun-Huei Tsau
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/61879490122607883700