Establishing automatic measurement based on interferometry
碩士 === 國立臺灣科技大學 === 電子工程系 === 90 === Interferometry is a versatile measurement technology for examining surface topography with very high precision. We need to change structure of measure system due to different application, and we adjust component for increasing precision so that we need to spend m...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/10746436467441662856 |