Establishing automatic measurement based on interferometry

• Main Author: 葉如炎
• Other Authors: 黃忠偉
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/10746436467441662856

碩士 === 國立臺灣科技大學 === 電子工程系 === 90 === Interferometry is a versatile measurement technology for examining surface topography with very high precision. We need to change structure of measure system due to different application, and we adjust component for increasing precision so that we need to spend much time. Furthermore, it’s limited precision by interferometric analysis program. In other word, we need powerful interferometric analysis program except have interferometer with good performance. In the thesis, we choose an interferometric analysis program which have 3 to 12 bucket algorithms, four unwrapping algorithms and can use Twyman-Green, Fizeau and Speckle interferometers. We use it to perform automatic measurement system with interferometry, and created molds for different application of measurement.