PZT/Ruthenate Electrode Heterostructures Grown by MOCVD and Their Ferroelectric Properties
碩士 === 國立臺灣科技大學 === 化學工程系 === 90 === This thesis reports our efforts on synthesis of calcium and strontium ruthenates, which serve as bottom electrodes for the PZT ferroelectric capacitor, and the relations between the microstructure and the ferroelectric properties of PZT/Ca, SrRuO3/Pt and PZT/Ca,...
Main Authors: | Wu Da-Ren, 吳達仁 |
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Other Authors: | Tsai Dah-Shyang |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/46796151440627048066 |
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