Development of MEMS Hot-Wire Chip for Portable Digital Electronic Spirometric System

• Main Authors: Nan Fu Chiu, 邱南福
• Other Authors: Chii-Wann Lin
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/38945952054325777414

碩士 === 國立臺灣大學 === 醫學工程學研究所 === 90 === A Spirometric system can be used to determine static and dynamic lung function for diagnosis, therapy and evaluation. In recent years, air pollution and deteriorating environment cause respiratory diseases increasing rapidly. A portable spirometric system, which aims for home care and possible screening test in hospital is the answer to this need. This paper will address the issues of system design, which include micro flow sensor, preamplifier circuit, micro-controller. By improving the flow sensor and system design, we will try to overcome the accuracy problems of currently used sensors. Recently, the established technologies of microelectromechanical system (MEMS) have enabled the possible minimization of spirometer with micro flow sensor. It includes the modular design for low power consumptions, precision volume productions, competitive price for disposable sensors. In this thesis, the focus is to improve sensor’s performance by using MEMS technologies and low power consumptions spriometer system. The use of American Thoracic Society (ATS) guideline for system implementation assures the quality of system for future upscale production of safe, economical and eary quality device.