Micromachined Variable Capacitors Using Device-level Vacuum Packaging
碩士 === 國立臺灣大學 === 應用力學研究所 === 90 === Modern wireless systems require high quality voltage-controlled oscillators (VCOs) that exhibit wide tuning range and low phase noise in the several gigahertz frequency ranges. With the explosive development of micromachining technologies, the variable capacitors...
Main Authors: | Chia-Hua Chu, 朱家驊 |
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Other Authors: | Peizen Chang |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/74300385269207889427 |
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