Micromachined Variable Capacitors Using Device-level Vacuum Packaging

碩士 === 國立臺灣大學 === 應用力學研究所 === 90 === Modern wireless systems require high quality voltage-controlled oscillators (VCOs) that exhibit wide tuning range and low phase noise in the several gigahertz frequency ranges. With the explosive development of micromachining technologies, the variable capacitors...

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Bibliographic Details
Main Authors: Chia-Hua Chu, 朱家驊
Other Authors: Peizen Chang
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/74300385269207889427