| Summary: | 碩士 === 國立清華大學 === 電子工程研究所 === 90 === In this thesis, we will present the design and fabrication of the embedded micro-heater in micro-well arrays for bio-processing application. Can be applied to PCR(polymerase chain reaction) operation. This structure mainly micro-heaters and micro-well arrays. The heater material we chosen is thin film platinum or boron diffused meander stripe. Platinum thin film is deposited by DC sputtering, and boron is diffused with solid boron source by thermal furnace. The micro-well is formed by KOH anisotropical etching.
The distribution of temperature on micro-heaters we are studied. The operating range of device temperature is from room temperature up to 100℃, sufficient for PCR operation. The time constant, defined by reaches the final temperature, for heating up and cooling down are estimated to be 3 sec to 10 sec, respectively.
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