Developing Data Mining Methods for Constructing A Wafer Bin Map Clustering and Classification System
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 90 === Because of the complex fabrication processes and the cost resulted from defects, analyzing wafer bin maps and mining potentially useful information from large such database become increasingly important in both research and application for semiconductor manuf...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02790608148078451796 |