A Study on the Design and Analysis of 3-Dimensional Micro-Optical Switch

碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 90 === Presently, the two-dimensional optical switch is widely applied in the field of the optics communication. Due to the restrictions of the Surface Micro-Machining in MEMS (Micro Electric-Mechanical System), the traditional optical switch can only deliver the...

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Bibliographic Details
Main Authors: Tsung-Fu Hsieh, 謝宗甫
Other Authors: Ying-Chien Tsai
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/41474261570329715920
Description
Summary:碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 90 === Presently, the two-dimensional optical switch is widely applied in the field of the optics communication. Due to the restrictions of the Surface Micro-Machining in MEMS (Micro Electric-Mechanical System), the traditional optical switch can only deliver the signal of fibers in a two-dimensional plane. The common frameworks and principles of two-dimensional optical switch, array of optical switches and micro-actuators are developed. Take the advantage of developed technologies and the concept of the spatial mechanisms, a three-dimensional optical switch possessing two degree of freedoms is designed in this study. Different from the single selectivity of the signal transmission delivered by the two-dimensional optical switch, the three-dimensional optical switch designed in this study possesses two main functions of signal transmission in vertical and horizontal directions. By means of function of these two transmission directions, the signal of fibers of two different silicon substrates can be easily connected. It is believed that, the possibility and the selectivity of the signal transmission of fibers are increased.