The non-linear electric resistivity of Au thin film on silicon after rapid thermal annealing
碩士 === 國立中山大學 === 物理學系研究所 === 90 === ABSTRACT In this work , a Four-Point probe electrical measurement system has been set up to investigate the non-linear conductivity of gold thin film on silicon . The annealing effect of gold thin films has been carried out by a rapid thermal annealing system u...
Main Authors: | wei-chi Wang, 王威智 |
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Other Authors: | Tai-Fa Young |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/24423653539583909380 |
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