Electro-optical properties of Sn doped In2O3 thin film derived from an ultrasonic atomization process
碩士 === 國立中山大學 === 材料科學研究所 === 90 === A thin film deposition system using ultrasonic atomization is designed and constructed. The coatings have been produced by pyrolysis using a solution of indium chloride in deionized water. Solution containing precursors is transported by carrying gas to the heate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46333378046683864459 |