Electro-optical properties of Sb and Ta doped SnO2 thin films derived from an ultrasonic atomization process
碩士 === 國立中山大學 === 材料科學研究所 === 90 === The thin film deposition system using ultrasonic nebulization was adopted in this study. SnCl4.5H2O, SbCl3, and TaCl5 were used as solutes. Ethanol was used as the solvent. Solutions of different Sn4+ concentration, Sb concentration (Sb/Sn atomic ratio) in Sn, an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99919811646719652559 |