Research on High-Precision Self-Moving Positioning Stages Utilizing Spring-mounted Piezoelectric Actuators

• Main Authors: Cheng-Wei Wang, 王正偉
• Other Authors: Yung-Tien Liu
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/65060319907761431377

碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 90 === ABSTRACT This thesis proposes a self-moving positioning stage consisting of a piezoelectric actuator and a spring for the applications of the automatic assembly, alignment and examination works of miniaturized precision components. The configurations of the positioning stage are to utilize the impact force caused by the rapid deformation of the piezoelectric actuator for the actuation of the positioning stage, and to utilize a compression spring to keep the continuous actuation by the piezoelectric actuator for the self-moving ability. The main advantages of the positioning stage are described as: by utilizing the impact force of piezoelectric actuator, it can overcome the stick-slip phenomenon that commonly occurs between the sliding surface in traditional mechanisms, hence the positioning stage can feature micron/nano step motion ability. Furthermore, the main disadvantage of the piezoelectric actuator in which its stroke is limited to only a few microns is successfully overcome by the combination with a simple compression spring. The content of the thesis covers the following research works: the configurations of the experimental setups which were used for examining the motion characteristics of the positioning stages were described, the theoretical models based on the configured experimental setups were established and the theoretical dynamic characteristics were analyzed, and a control model based on the experimental setup was configured and the experiments for the automatic control system were carried out. In the works for examining the motion characteristics of the positioning stage, an experimental setup with the actuation along only one direction of motion was configured. Several parameters, e.g., the amplitude of the applied voltage, the mass of the positioning stage, the stiffness of the spring, and the pre-set contact force, which affect the motion behaviors of the positioning stage were examined and discussed. The experimental results show that the proposed positioning stage can be continuously actuated precisely with 10-nanometer order of precision step motion. In the works for theoretically analyzing the dynamic characteristics of the positioning stage, a simple mass-damper-spring mechanical vibration model was established, and the simulation works were carried out. According to the numerical results agreed well with experimental results, the validation of the analysis model was confirmed. In the works for examining the characteristics of automatic positioning control, a closed-loop control system including the positioning stage having one-degree-of-freedom (1-DOF), personal computer, measuring device, power supplier and controller was configured. The experimental results show that the control system can successfully position the stage with the accuracy of 12 nm. This accuracy is limited by the resolution of the measuring system. Having the advantages of high-precision positioning ability, large travel range, and simple controller, it is expected that the positioning stage developed in the thesis will be widely applied to the precision industry. Especially, due to its simple structure, it is easier to configure the positioning stage having multi-degree-of-freedom in the future works. Their applications will cover the alignment works for the laser-fiber connectors, automation assembly works for the miniaturized precision components, and the precision examination works for the semiconductor or biological fields.