Field study of particle deposition in the exhaust gas of semiconductor manufacturing process
碩士 === 國立交通大學 === 產業安全與防災學程碩士班 === 90 === Abstract The objective of this study is to verify the method of covering exhaust pipe with heating tape to prevent particles from deposition and to evaluate the deposition efficiency of aerosol particles in the exhaust pipe of the se...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85922665337678493865 |