A Study of the Sources and Control of the Odor of a Semiconductor Factory
碩士 === 國立交通大學 === 環境工程所 === 90 === The purpose of the study is to find out the source of the odor in ambient air around some semiconductor factory. Porous metal denuders were used to sample the acid and base gas and aerosol at the inlet and outlet of the acid gas packed tower scrubber to find the co...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
|
Online Access: | http://ndltd.ncl.edu.tw/handle/78000063258077254096 |