Fabrication for the Structure of Micro-Vibrating Ring Gyroscope
碩士 === 國立交通大學 === 機械工程系 === 90 === The main purpose of this thesis is to fabricate the structure of vibrating ring gyroscope based on MEMS technology by replacing the conventional mechanical gyroscopes with high cost, and complication as well as uneasily-fabricate. The vibratin...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/77641725005099044488 |