| Summary: | 碩士 === 國立交通大學 === 機械工程系 === 90 === The main purpose of this thesis is to fabricate the structure of vibrating ring gyroscope based on MEMS technology by
replacing the conventional mechanical gyroscopes with high cost, and complication as well as uneasily-fabricate. The vibrating ring gyroscope in this thesis is one kind of vibrating shell gyroscopes. By means of VLSI and micromachined techniques, we can realize the fabrication of main structure with small size and decrease fabrication cost on batch process. In this thesis, we use lithography, anodic bonding, wet etching (KOH), and dry etching (ICP or RIE) to implement our micro-vibrating structure.
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