The Simulation of Thermal Flow Field in LPCVD Chamber Using Parallel DSMC Method

• Main Authors: Zhong-Yuan Zang, 臧忠元
• Other Authors: Chiun-Hsun Chen
• Format: Others
• Language: en_US
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/73951074901214840920

碩士 === 國立交通大學 === 機械工程系 === 90 === In this thesis, the parallelization is applied to DSMC method by utilizing chain partitioner. The computation is carried out on a PC cluster system consisting of nine processors. The preliminary results are compared with the Hsiao’s single-processor results [5], to demonstrate the advantage of parallelization. The computational domain is decomposed according to the same number of simulated particles in each processor. When a parallel program is executed on a distributed memory system, the speedup may not be proportional linearly to the number of processor. The computing load in each processor becomes lighter by increasing the processor number, whereas the communication load becomes heavier at the same time. Therefore the efficiency becomes worse with an increment of processor number. The parametric studies are based on the variations of particle number, computing domain size and time step, respectively. The better speedup and efficiency can be achieved when the particle number and computational domain increase. The performance does not depend on time step in present case because the variation of particle number is not severe.