Fabrication of NdBa2Cu3O7-δ Superconducting Thin Films on Sapphire

• Main Authors: Tsan-Yao Cheng, 鄭璨耀
• Other Authors: Jenh-Yih Juang
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/50302624726758649058

碩士 === 國立交通大學 === 電子物理系 === 90 === Superconducting NdBa2Cu3O7-δ(NBCO)/PrBa2Cu3O7-δ(PBCO) multilayer films have been successfully grown on sapphire (1102) substrate by pulsed laser deposition (PLD). By optimizing the deposition conditions, smooth NBCO thin films with Tc = 93.0 K was obtained. X-ray diffraction (XRD) results showed that the as-grown NBCO films were all c-axis oriented with no observable second phases. Coplanar resonators were patterned by UV photolithography and wet chemical etching on a 5 mm × 10 mm film. The success of growing NBCO films on sapphire substrates promises the realization of fabricating extremely low loss microwave devices. The result and associated key parameter in determining the performance of the resonator will be discussed.